Substrats

Materials
	Aluminium oxid ceramic 99.6% (Al2O3)
	Aluminium nitrid ceramic (AIN)
	Quartz glass
	Low alkali Borosilikat glass
	Other ceramics on demand
Dimensions
	Standard: 2“ x 2“, 4“ x 4“
Thickness
	Ceramic substrats: 0.254 mm; 0.381 mm; 0.635 mm
	Quartz glass: 0.178 mm; 0.254 mm
	Other sizes on demand

Layers

Materials
	TiW / Au
	TaN / TiW / Au
	TiW / Pd / Au
	CrNi / Cu
Surfaces
	chem. Ni + Au on copper (solderable and bondable)
	galv. Ni + Au on copper (solderable and bondable)
	galv. Au (bondable)
	chem. Sn on Cu (solderable)
	hard gold
	Pd-soldering layer sputtered
Layer sizes and spaces
	min. 5 µm
	tolerance: min. +/- 2 µm

Resistors

Material
	CrNi (temperature coefficient adjustable)
	TaN (high solid)
Surface resistance
	20 ... 200 Ohm/sq
Laser adjustment tolerance
	Standard: < 0.5 %; min. < 0.1 %
Temperature coefficient
	CrNi: adjustable from –20 to +60 ppm/K
	TaN: -90 ppm/K
	Tracking: < 5 ppm/K

Technical Feasibilities

	Laser cutting and drilling
	Separating by sawing
	Multiple surfaces technique with through plating
	Protection coating